JPH0721256Y2 - 基板の表面処理装置 - Google Patents
基板の表面処理装置Info
- Publication number
- JPH0721256Y2 JPH0721256Y2 JP297890U JP297890U JPH0721256Y2 JP H0721256 Y2 JPH0721256 Y2 JP H0721256Y2 JP 297890 U JP297890 U JP 297890U JP 297890 U JP297890 U JP 297890U JP H0721256 Y2 JPH0721256 Y2 JP H0721256Y2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- liquid discharge
- discharge nozzle
- substrate
- processing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 25
- 238000004381 surface treatment Methods 0.000 title claims description 9
- 239000007788 liquid Substances 0.000 claims description 65
- 238000012545 processing Methods 0.000 claims description 41
- 238000004891 communication Methods 0.000 claims description 6
- 238000011161 development Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297890U JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297890U JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0394979U JPH0394979U (en]) | 1991-09-27 |
| JPH0721256Y2 true JPH0721256Y2 (ja) | 1995-05-17 |
Family
ID=31506820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP297890U Expired - Fee Related JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721256Y2 (en]) |
-
1990
- 1990-01-16 JP JP297890U patent/JPH0721256Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0394979U (en]) | 1991-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |